Development of ozone gas senors based on delafossite thin films
Joint Event on 2nd International Conference on Nanomaterials and Nanotechnology & 22nd International Conference on Advanced Nanoscience and Nanotechnology
May 16-17, 2019 | Prague, Czech Republic
Luxembourg Institute of Science and Technology, Luxembourg
Posters & Accepted Abstracts : Mater Sci Nanotechnol
Ozone gas sensors development is a growing need in modern days, due to it’s increase use in several industry areas. A major problem is it’s production in office enviroment by lab equipments and laser printers. Ozone exposure can cause several long run cardiopulmunary problems. With this in mind there is the urge to develop efficient, cheap and office compatible sensors. Delafossite is an interesting p-type material that has shown it’s responsivity to ozone. With this in mind we will deeply explore delafossite properties and it’s responsivity to ozone as well as it’s integration into devices and understand the udnerlaying relation. Our delafossite films are deposited by Metal Organic Chemical Vapor Deposition (MOCVD) and undergo annealing steps in order to control its electrical properties. We have been developing a state of the art etching process for delafossite with interesting results, leading into the patterning and We have been developing a state of the art etching process for delafossite with interesting results, leading into the patterning and the integration of the first devices.